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Astex seocal diamond cvd coater w/large custom chamber
Astex Seocal Diamond CVD Coater w/Large Custom Chamber
ASTeX AX3060 ECR Plasma Source PECVD Diamond Reactor - Large Platform
MTS/ASTeX AX3060 Microwave Reactor with Expanded Custom Chamber is a perfect platform for creating an integrated, customized Diamond CVD (Chemical Vapor Deposition) coating process. This microwave reactor was mounted on a large frame interfacing an enlarged working chamber by a high-end R&D facility.
* ASTeX AX3060 SmartMatch Intelligent Microwave Matching Unit
* Astex SXRH Magnetron Head
* SmartMatch Detector Module
* Astex AX3060-4 Local Interface
* Astex DSM 2.5-10.5 Exit Magnet
* MKS Type 124 PN 124AA-0001-AB 10 Torr +/1 15VDC Output
* Tubing & Flow Valves for Helium ; Nitrogen Tubing, Water Hose System, Various Other Tubing & Flow Valves
* Square Chamber 14 1/2 in. (W) x 10 in. (H) x 15 1/2 in. (D) Front Loading, 4 each 2 3/4 in. Flange Eye Ports, 10 in. Dish surrounded by 1/4 in. Helium tube & 2 3/4 in. center opening, Pneumatic Armature Assembly
* Back Chamber 9 1/2 in. Diameter 18 1/4 in. Deep, Flange Ports & 5 in. opening at base for pump attachment
* Large Frame/Platform & Misc Plasma Therm SLR 770 Components
* Microwave & ECR Power Supply, Vacuum Pump & Computer not included.
* Base Unit for Constructing Customized Diamond CVD System
* Parts Unit for MTS/ASTeX 3060 Reactor/Diamond CVD System
* Base Unit for Rebuilding a Plasma Therm SLR 770 MainFrame w/ASTeX Diamond CVD System
* Parts Unit for Plasma Therm SLR 770 MainFrame w/ASTeX Diamond CVD System
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